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1

Acid-catalyzed deprotection mechanism of tert-butyloxycarbonyloxy polymers in chemically amplified resists

Rieko Ichikawa, Masayuki Hata, Noriaki Okimoto, Setsuko Oikawa–Handa, Minoru Tsuda

Journal:

Journal of Polymer Science Part A: Polymer Chemistry

Year:

1998

Language:

english

File:

PDF, 331 KB

english, 1998

2

Chemically Amplified Resists. V Photochemical Proton Generation Mechanism from Triphenylsulfonium Salts.

Oikawa, Setsuko, Fujii, Norikazu, Hata, Masayuki, Tsuda, Minoru

Journal:

Journal of Photopolymer Science and Technology

Year:

1994

Language:

english

File:

PDF, 214 KB

english, 1994

3

Dry development and fine pattern fabrication PMIPK-Azide dry-developable resist in electron beam lithography

Minoru Tsuda, Mitsuo Yabuta, Kazuhiro Yamashita, Setsuko Oikawa, Akira Yokota, Nakane Hisashi, Kenji Gamo, Susumu Namba

Journal:

Microelectronic Engineering

Year:

1984

Language:

english

File:

PDF, 636 KB

english, 1984

4

Elementary processes of surface reaction in amorphous silicon film growth

Setsuko Oikawa, Satomi Ohtsuka, Minoru Tsuda

Journal:

Applied Surface Science

Year:

1992

Language:

english

File:

PDF, 357 KB

english, 1992

5

Dry developable resist in e-beam and sr lithography

Minoru Tsuda, Setsuko Oikawa, Mitsuo Yabuta, Akira Yokota, Hisashi Nakane, Nobufumi Atoda, Koichiro Hoh, Kenjj Gamo, Susumu Namba

Journal:

Polymer Engineering & Science

Year:

1986

Language:

english

File:

PDF, 748 KB

english, 1986

6

Chemically amplified resists. III. The final phenolic product formation mechanism from t-BOC.

ICHIKAWA, RIEKO, TSUDA, MINORU, OIKAWA, SETSUKO

Journal:

Journal of Photopolymer Science and Technology

Year:

1993

Language:

english

File:

PDF, 167 KB

english, 1993

7

Acid-catalyzed degradation mechanism of poly(phthalaldehyde): Unzipping reaction of chemical amplification resist

Minoru Tsuda, Masayuki Hata, Rie Nishida, Setsuko Oikawa

Journal:

Journal of Polymer Science Part A: Polymer Chemistry

Year:

1997

Language:

english

File:

PDF, 667 KB

english, 1997

8

On the primary process in plasma-chemical and photochemical vapor deposition from silane: An ab initio study of unimolecular decomposition of SiH4 in the lowest triplet state

Minoru Tsuda, Setsuko Oikawa, Kiyoshi Nagayama

Journal:

Chemical Physics Letters

Year:

1985

Language:

english

File:

PDF, 304 KB

english, 1985

9

Elementary process of the thermal decomposition of alkyl gallium

Setsuko Oikawa, Minoru Tsuda, Mutsuo Morishita, Masao Mashita, Yasuo Kuniya

Journal:

Journal of Crystal Growth

Year:

1988

Language:

english

File:

PDF, 731 KB

english, 1988

10

Atomic layer epitaxial growth mechanism of a gallium layer on the (100) As surface of GaAs crystals in MOVPE

Tsuda, Minoru, Oikawa, Setsuko, Morishita, Mutsuo, Mashita, Masao

Journal:

Journal of Crystal Growth

Year:

1990

Language:

english

File:

PDF, 249 KB

english, 1990

11

Epitaxial growth mechanism at SB steps of Si(001) surfaces by photo-induced Si(1D) atoms

Minoru Tsuda, Setsuko Oikawa, Shinji Furukawa

Journal:

Journal of Crystal Growth

Year:

1991

Language:

english

File:

PDF, 421 KB

english, 1991

12

SB step growth mechanism on the reconstructed (001) surface: cluster migrations at the growing edge

Masayuki Hata, Ghika Ohara, Setsuko Oikawa, Minoru Tsuda

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 424 KB

english, 1994

13

Surface migration enhancement of adatoms in the photoexcited process on reconstructed diamond (001) surfaces

Masayuki Hata, Minoru Tsuda, Norikazu Fujii, Setsuko Oikawa

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 580 KB

english, 1994

14

Plasma-chemical and photo-chemical vapor decomposition mechanism of disilane in the lowest triplet state

Setsuko Oikawa, Minoru Tsuda, Satomi Ohtsuka

Journal:

Journal of Molecular Structure

Year:

1994

Language:

english

File:

PDF, 469 KB

english, 1994

15

Adatom migrations and nucleations on reconstructed (001) surfaces II. Diamond

Minoru Tsuda, Masayuki Hata, Setsuko Oikawa

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 453 KB

english, 1996

16

Theoretical considerations on the sensitivities of electron beam resists

Minoru Tsuda, Setsuko Oikawa, Akira Suzuki

Journal:

Polymer Engineering & Science

Year:

1977

Language:

english

File:

PDF, 473 KB

english, 1977

17

Plasma developable photoresist containing electronic excitation energy quenching system

Minoru Tsuda, Setsuko Oikawa, Akira Yokota, Mitsuo Yabuta, Wataru Kanai, Ken-Ichi Kashiwagi, Isamu Hijikata, Hisashi Nakane

Journal:

Polymer Engineering & Science

Year:

1983

Language:

english

File:

PDF, 670 KB

english, 1983

18

Theoretical aspects of the radiation effects of polymers

Minoru Tsuda, Setsuko Oikawa

Journal:

Journal of Polymer Science Part A: Polymer Chemistry

Year:

1979

Language:

english

File:

PDF, 658 KB

english, 1979

19

Potential-energy surfaces in the lower excited states of benzene⇌Dewar–benzene isomerization process

Minoru Tsuda, Setsuko Oikawa, Katsuhiko Kimura

Journal:

International Journal of Quantum Chemistry

Year:

1980

Language:

english

File:

PDF, 324 KB

english, 1980

20

Anab initiotheoretical research on perfluorochemicals as oxygen carriers

Setsuko Oikawa, Minoru Tsuda, Kiyoshi Nagayama

Journal:

Theoretical Chemistry Accounts: Theory, Computation, and Modeling (Theoretica Chimica Acta)

Year:

1984

Language:

english

File:

PDF, 454 KB

english, 1984

21

Adatom migrations and nucleations on reconstructed (001) surfaces I. Si

Minoru Tsuda, Masayuki Hata, Ei-ichi Araki, Setsuko Oikawa

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 491 KB

english, 1996

22

Plasma-chemical and photo-chemical vapor decomposition mechanism of disilane in the lowest triplet state

Setsuko Oikawa, Minoru Tsuda, Satomi Ohtsuka

Journal:

Journal of Molecular Structure: THEOCHEM

Year:

1994

Language:

english

File:

PDF, 889 KB

english, 1994

23

Esophageal squamous cell carcinoma characterized by extensive chondroid differentiation

Tamotsu Sugai, Moriyasu Oikawa, Noriyuki Uesugi, Wataru Habano, Yu-Fei Jiao, Shin-ichi Nakamura, Setsuko Hatakeyama, Makoto Suhara, Kouei Hatafuku

Journal:

Pathology International

Year:

2000

Language:

english

File:

PDF, 1.07 MB

english, 2000

24

Brugia pahangi: Production of a monoclonal antibody reactive with the surface of infective larvae

Yosaburo Oikawa, Teruaki Ikeda, Yoichiro Horii, Koichiro Fujita, Setsuko Tsukidate

Journal:

Experimental Parasitology

Year:

1992

Language:

english

File:

PDF, 2.29 MB

english, 1992

25

Adatom migration mechanism at SA steps on (001) surfaces of diamond structure crystals

Minoru Tsuda, Masayuki Hata, Yukiko Shin-no, Setsuko Oikawa

Journal:

Surface Science

Year:

1996

Language:

english

File:

PDF, 418 KB

english, 1996

26

Epitaxial growth mechanism of diamond crystal in methane-hydrogen plasma

Tsuda, Minoru., Nakajima, Mitsuo., Oikawa, Setsuko.

Journal:

Journal of the American Chemical Society

Year:

1986

Language:

english

File:

PDF, 437 KB

english, 1986

27

The Expression of Adhesion Molecules and Proliferative Activity in the Human Gingival Epithelium

Oikawa, Yuko, Hatakeyama, Setsuko

Journal:

Journal of Oral Biosciences

Year:

2004

Language:

english

File:

PDF, 4.31 MB

english, 2004

28

Prefulvene as a stable intermediate at the potential energy surface minimum of the benzene .dblharw. benzvalene isomerization process

Oikawa, Setsuko, Tsuda, Minoru, Okamura, Yoriko, Urabe, Tadashi

Journal:

Journal of the American Chemical Society

Year:

1984

Language:

english

File:

PDF, 567 KB

english, 1984

29

Origin of the temperature-dependent product variation in carbene reaction with alcohol

Oikawa, Setsuko, Tsuda, Minoru

Journal:

Journal of the American Chemical Society

Year:

1985

Language:

english

File:

PDF, 698 KB

english, 1985

30

On the primary process in the plasma-chemical and photochemical vapor deposition from silane. Mechanism of the radiative species SiH∗(A 2Δ) formation

Oikawa, Setsuko, Tsuda, Minoru, Yoshida, Junko, Jisai, Yasuhiro

Journal:

The Journal of Chemical Physics

Year:

1986

Language:

english

File:

PDF, 731 KB

english, 1986

31

On the primary process in the plasma-chemical and photochemical vapor deposition from silane. III. Mechanism of the radiative species Si∗(1P 0) formation

Tsuda, Minoru, Oikawa, Setsuko, Sato, Kazufumi

Journal:

The Journal of Chemical Physics

Year:

1989

Language:

english

File:

PDF, 779 KB

english, 1989

32

Epitaxial Growth Mechanism of the (100) As Surface of GaAs -- The Effect of Positive Holes --

Tsuda, Minoru, Morishita, Mutsuo, Oikawa, Setsuko, Mashita, Masao

Journal:

Japanese Journal of Applied Physics

Year:

1988

File:

PDF, 591 KB

1988

33

High-Remaining Dry-Developed Resist Patterns of Steep Profile

Tsuda, Minoru, Yokota, Akira, Kashiwagi, Ken-ichi, Yabuta, Mitsuo, Oikawa, Setsuko, Kanai, Wataru, Nakane, Hisashi

Journal:

Japanese Journal of Applied Physics

Year:

1983

File:

PDF, 980 KB

1983

34

The Importance of the Positively Charged Surface for the Epitaxial Growth of Diamonds at Low Pressure

Tsuda, Minoru, Nakajima, Mitsuo, Oikawa, Setsuko

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 391 KB

1987

35

FORMATION OF BENZ[ cd ]INDAZOLE BY LOW-TEMPERATURE PHOTOLYSIS OF 1,8-DIAZIDONAPHTHALENE IN A RIGID MATRIX

Yabe, Akira, Honda, Koichi, Oikawa, Setsuko, Tsuda, Minoru

Journal:

Chemistry Letters

Year:

1976

Language:

english

File:

PDF, 5.75 MB

english, 1976

36

An application of molecular orbital theory for screening research of antifungal drugs.

OIKAWA, SETSUKO, TSUDA, MINORU, OHNOGI, SHIGEKAZU, KURITA, NOBUYUKI

Journal:

CHEMICAL & PHARMACEUTICAL BULLETIN

Year:

1980

File:

PDF, 449 KB

1980

37

Structure-activity relationship for antibacterial action of phenolic and aromatic nitro compounds. An attempt at systematic identification of new antibacterial agents.

OIKAWA, SETSUKO, TSUDA, MINORU, ENDOU, KIKUTAROU, ABE, HIDEKO, MATSUOKA, MAYUMI, NAKAJIMA, YOSHINORI

Journal:

CHEMICAL & PHARMACEUTICAL BULLETIN

Year:

1985

File:

PDF, 912 KB

1985

38

Reactive intermediates produced in the decomposition of 2-diazoketone : Mechanism of the Wolff rearrangement.

TSUDA, MINORU, OIKAWA, SETSUKO, NAGAYAMA, KIYOSHI

Journal:

CHEMICAL & PHARMACEUTICAL BULLETIN

Year:

1987

Language:

english

File:

PDF, 989 KB

english, 1987

39

Quantum-chemical elucidation of the mechanism of the NIH-shift during aryl hydroxylation catalyzed by cytochrome P-450.

TSUDA, MINORU, OIKAWA, SETSUKO, OKAMURA, YORIKO, KIMURA, KATSUHIKO, URABE, TADASHI, NAKAJIMA, MITSUO

Journal:

CHEMICAL & PHARMACEUTICAL BULLETIN

Year:

1986

File:

PDF, 985 KB

1986

40

Theoretical study of oxygen atom (1D) insertion into methane.

NAKAJIMA, MITSUO, TSUDA, MINORU, OIKAWA, SETSUKO

Journal:

CHEMICAL & PHARMACEUTICAL BULLETIN

Year:

1987

Language:

english

File:

PDF, 963 KB

english, 1987

41

Mechanism of the Wolff rearrangement.

Tsuda, Minoru, Oikawa, Setsuko

Journal:

CHEMICAL & PHARMACEUTICAL BULLETIN

Year:

1989

File:

PDF, 470 KB

1989

42

Synthesis of N-Acetyl-4-Nitro-l-Naphthylamine, A Spectral Sensitizer for Photosensitive Polymers

TSUDA, Minoru, NISHIKUBO, Tadatomi, OIKAWA, Setsuko, MIYAKE, Ryoichi

Journal:

Journal of the Japan Society of Colour Material

Year:

1972

Language:

english

File:

PDF, 758 KB

english, 1972

43

Chemically amplified resists. VII. proton generation from triphenyl sulfonium salts via photochemical isomerization mechanism.

OHMORI, NORIHITO, NAKAZONO, YOSHIKAZU, TSUJINO, AKIKO, HATA, MASAYUKI, OIKAWA, SETSUKO, TSUDA, MINORU

Journal:

Journal of Photopolymer Science and Technology

Year:

1995

Language:

english

File:

PDF, 192 KB

english, 1995

44

Elementary reactions in photochemistry of 2-diazoquinones and 2-diazoketones.

TSUDA, MINORU, OIKAWA, SETSUKO

Journal:

Journal of Photopolymer Science and Technology

Year:

1989

Language:

english

File:

PDF, 539 KB

english, 1989

45

Chemically amplified resists IV. Proton-catalyzed degradation mechanism of poly(phthalaldehyde).

TSUDA, MINORU, HATA, MASAYUKI, NISHIDA, RIE, OIKAWA, SETSUKO

Journal:

Journal of Photopolymer Science and Technology

Year:

1993

Language:

english

File:

PDF, 165 KB

english, 1993

46

Chemical amplification resists II. Degradation mechanism of t-BOC.

TSUDA, MINORU, ICHIKAWA, RIEKO, OIKAWA, SETSUKO

Journal:

Journal of Photopolymer Science and Technology

Year:

1992

Language:

english

File:

PDF, 151 KB

english, 1992

47

Chemically amplified resists VI. photochemical proton generation mechanism from 2-oxocyclohexyl-cyclohexyl-methyl sulfonium salts.

TSUJINO, AKIKO, NAKAZONO, YOSHIKAZU, OHMORI, NORIHITO, HATA, MASAYUKI, OIKAWA, SETSUKO, TSUDA, MINORU, NAKANO, KAICHIRO, HASEGAWA, ETSUO

Journal:

Journal of Photopolymer Science and Technology

Year:

1995

Language:

english

File:

PDF, 202 KB

english, 1995

48

Photochemical proton generation mechanism from onium salts.

TSUDA, MINORU, OIKAWA, SETSUKO

Journal:

Journal of Photopolymer Science and Technology

Year:

1990

Language:

english

File:

PDF, 390 KB

english, 1990

49

(Invited) Mechanism of Dry Development and Dry Etch Resistance of Resist

Tsuda, Minoru, Oikawa, Setsuko

Journal:

Japanese Journal of Applied Physics

Year:

1982

File:

PDF, 863 KB

1982

50

Expression Patterns of Adhesion Molecules in Human Gingival Epithelium

Hatakeyama, Setsuko, Oikawa, Yuko, Yaegashi, Takashi, Fujiwara, Hideaki, Furuya, Izuru, Satoh, Masanobu

Journal:

Journal of Hard Tissue Biology

Year:

2005

Language:

english

File:

PDF, 23 KB

english, 2005